Naat, JohnsonNune (2014) Sintesis dan Karakterisasi Lapisan Tipis Timbal Zirkonat Titanat (PZT) dengan Variasi Penambahan Pelarut dan Kecepatan Putar Deposisi. Magister thesis, Universitas Brawijaya.
Abstract
Material Piezoelektrik adalah material yang dapat mengubah energi mekanik menjadi energi listrik atau dari energi listrik menjadi energi mekanik. Keramik piezoelektrik yang banyak digunakan adalah lead-zirconate-titanate (PZT). Salah satu metode untuk mensintesis lapisan tipis PZT adalah sol-gel. Kualitas pembentukan struktur mikro lapisan tipis menggunakan proses reaksi sol-gel dipengaruhi konsentrasi pelarut dan kecepatan putar deposisi. Modifikasi pelarut diharapkan reaksi hidrolisis dan kondensasi dapat berjalan optimum. Propanol sebagai pelarut akan berperan sebagai medium cair dan agen penghomogen dalam reaksi sol-gel. Kecepatan putar merupakan salah satu faktor terpenting dalam proses spin coating . Semakin cepat putaran akan diperoleh lapisan tipis yang semakin homogen dan tipis. Oleh karena itu dalam penelitian ini penulis tertarik untuk mempelajari pengaruh penambahan pelarut dan kecepatan putar terhadap struktur kristal, morfologi dan ketebalan lapisan tipis PZT. Penelitian ini dilakukan penambahan pelarut propanol 0 mL, 1 mL, 3 mL dan 5 mL serta masing-masing dideposisi dengan kecepatan putar 2000 rpm, 3000 rpm dan 4000 rpm. Sintesis PZT dilakukan menggunakan metode sol-gel dengan penstabil PEG-400 melalui proses refluks. Pembuatan lapisan tipis dilakukan melalui teknik spin coating menggunakan substrat silikon (100) dan dianil pada temperatur 600 oC. Karakterisasi awal lapisan tipis dilakukan dengan mikroskop optik untuk melihat secara umum morfologi permukaan lapisan tipis PZT sebelum dikarakterisasi dengan XRD dan SEM. Selanjutnya karakterisasi dengan XRD untuk melihat orientasi bidang kristal yang muncul dan pencitraan SEM untuk mengobservasi morfologi dan ketebalan lapisan tipis PZT. Hasil XRD menunjukkan bahwa puncak-puncak yang muncul adalah kristal perovskit dengan orientasi bidang kristal (001), (100), (101), (110), (200), (201) & (210), dan (022). Penambahan pelarut dan kecepatan putar memberikan pengaruh terhadap kristalinitas, morfologi dan ketebalan kristal lapisan tipis PZT. Semakin banyak penambahan pelarut dan semakin tinggi kecepatan putar menyebabkan intensitas difraksi bidang kristal semakin menurun dan tidak muncul beberapa orientasi bidang kristal. Ukuran kristal semakin menurun dan tidak berpengaruh terhadap komposisi fase tetragonal dan rhombohedral. Hasil citra SEM menunjukkan bahwa morfologi permukaan semakin rata, morfologi permukaan berturut-turut berbentuk grain , layer dan island serta tidak adanya retakan ( crack ), ketebalan lapisan semakin menurun, serta hasil EDX menunjukkan komposisi mol Zr/Ti yang berada di morphotropic phase boundary (MPB). Hal ini disebabkan karena semakin meningkat penambahan pelarut, konsentrasi larutan PZT semakin kecil dan encer serta semakin tinggi kecepatan putar, gaya sentrifugal yang dihasilkan semakin besar sehingga gel PZT lebih mudah terpencar keluar substrat dan terdistribusi secara merata di atas permukaan substrat.
English Abstract
Piezoelectric materials are materials that can convert both mechanical energy into electrical energy and electrical energy into mechanical energy. Among them, lead zirconate titanate is the most commonly used material to prepare ceramic piezoelectric. This material can be easily synthesized utilising the most commonly method which is the sol-gel method. The microstructre quality of the PZT generated by this method was influenced by the solvent and the angular velocity deposition. The modification of the solvent is expected to optimize the hydrolysis and condensation of the sol-gel reaction. The use of propanol as the solvent, in this research, is supposed to play roles as both the 1iquid medium and the homogenizing agent in sol-gel reaction. The other important factor that influences the quality of the PZT material in spin coating processes is the angular velocity deposition. Higher angular velocity produces thinner and more homogenous film of PZT. Therefore, it is the author`s interest to study the influence of the solvent addition and angular velocity deposition on the crystal structure, morphology, and thickness of PZT thin film. The research involved the addition of propanol with the variety of volume from 0 mL, 1 mL, 3 mL and 5 mL. Each of them was further deposited with the angular velocity of 2000 rpm, 3000 rpm and 4000 rpm, respectively. The synthesis of PZT was done through sol-gel method utilized PEG-400 as the stabilizer with reflux process. This PZT was further deposited on the surface of silicon substrate (100) with spin coating technique and subsequently annealed at 600 oC. The morphology of the PZT thin film was initially determined using optic microscope before it was characterized by XRD and SEM. XRD characterization was intended to understand the orientation of the crystal plane while SEM image aimed at observing the microstructure morphology and thickness of the PZT thin film. The XRD results showed the appearance of the perovskite crystal with the orientation of crystal planes on (001), (100), (101), (110), (200), (201) & (210), and (022). The results also indicated the absence of crystal plane orientation and the decrease in the intensity of the crystal plane orientation along with the increase of the solvent addition and the angular velocity. The results further suggested that the increase in the solvent addition and angular velocity followed by the decrease in the crystally size and had no effect on the composition of tetragonal and rhombohedral phases. SEM image result indicated that the increase in the angular velocity and solvent addition provided the PZT with better morphology including its fineness, flatness and homogenity. Furthermore, it was found that the number of cracking on the surface of PZT thin film could be minimized and even eliminated by increasing the solvent addition and angular velocity. Subsequently, the PZT thin films generated were thinner and they are respecivelly produced with the characterized surface morphology in the form of grain, layer and island. The EDX result revealed that the atomic composition of Zr/Ti lied within the MPB. It may be caused the higher the angular velocity and the solvent addition applied the lower the PZT concentration and the greater the centrifugal force generated leading to the homogenously and evenly distributed of PZT gel on the surface of the substrate. Finally, it can be concluded that the increase of solvent addition and angular velocity positivelly influenced the crystallinity, morphology and thickness of PZT thin film.
| Item Type: | Thesis (Magister) |
|---|---|
| Identification Number: | TES/537.244 6/NAA/s/041405803 |
| Subjects: | 500 Natural sciences and mathematics > 537 Electricity and electronics > 537.2 Electrostatics |
| Divisions: | S2/S3 > Magister Matematika, Fakultas MIPA |
| Depositing User: | Endro Setyobudi |
| Date Deposited: | 02 Oct 2014 14:50 |
| Last Modified: | 02 Oct 2014 14:50 |
| URI: | http://repository.ub.ac.id/id/eprint/157509 |
Actions (login required)
 |
View Item |