MohammadAbdullah (2009) Permodalan efek jendela pada pengukuran ellipsometri dengan menggunakan software matlab. Sarjana thesis, Universitas Brawijaya.
Abstract
Ellipsometri adalah suatu teknik pengukuran konstanta optik dengan menganalisa fenomena polarisasi cahaya terpantul dari sampel. Pada pengukuran secara in-situ , data hasil pengukuran ellipsometri membutuhkan koreksi dikarenakan efek jendela. Koreksi dilakukan dengan menggunakan model matrik Jones dengan mencari besar intensitas cahaya pada sistem tanpa dan dengan jendela. Model matrik jones jendela didapat dari reduksi matrik Mueller jendela untuk mengoreksi efek jendela agar intensitas antara sistem jendela dan tanpa jendela mirip. Penjelasan konstanta optik sampel dapat diketahui dengan parameter Cauchy. Hasil model matrik Jones jendela mampu mengoreksi efek jendela pada sudut pengukuran 500, 550 dan 600 pada range panjang gelombang 300 – 800 nm. Hasil model parameter Cauchy menunjukkan sampel bersifat transparan dan non-dichroic karena sampel mengabsorpsi gelombang elektromagnetik pada range ultra violet.
English Abstract
Ellipsometry is a technical measurement of optical constant by analysis phenomenon of reflection polarization by a sample. For in-situ measurement, The ellipsometry data need correction because of windows effect. The correction was done utilizing Jones matrices to calculate the intensity of light which was measured with and without window. Jones matrices for window was got by reduction of Mueller matrices for window to correct the windows effect in order to the intensity of light between the system with and without window was similar. The Explanation of optical constant sample is known by Cauchy parameter. The correction result by Jones matrices of window can correct windows effect at measurement angle 500, 550 and 600 at range of wave length 300 -800 nm. The result of Cauchy parameter explain that the sample is transparent and non-dichroic because it absorps electromagnetic wave at ultra violet range.
| Item Type: | Thesis (Sarjana) |
|---|---|
| Identification Number: | SKR/MIPA/2009/80/050900629 |
| Subjects: | 500 Natural sciences and mathematics > 510 Mathematics |
| Divisions: | Fakultas Matematika dan Ilmu Pengetahuan Alam > Matematika |
| Depositing User: | Unnamed user with email repository.ub@ub.ac.id |
| Date Deposited: | 06 Mar 2009 09:25 |
| Last Modified: | 22 Oct 2021 02:14 |
| URI: | http://repository.ub.ac.id/id/eprint/152360 |
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